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Spartan™ Sorter
Asyst’s new Spartan Sorter is truly a next generation 300mm wafer handling
solution. Designed from the outset as a unified wafer management system, Spartan Sorter
embodies the minimum scale and complexity necessary to accomplish its core job
of moving wafers as cleanly and as quickly as possible. This improves reliability
and maximizes efficiency, while delivering industry-leading cleanliness with
the lowest particle levels.
Ease of set-up and serviceability are key attributes of the Spartan Sorter.
Spartan Sorter's simple, scalable architecture provides rapid integration with
equipment and easy service and maintainability. Fully compliant with SEMI standards,
Spartan Sorter is available in several options to support various sorting applications
to optimize total capital dollars needed to support a fab.
Maximum Productivity & Profitability
- Features an optimized minienvironment for best-in-class cleanliness
with better than ISO Class 1 performance.
- Dual, ultra-thin edge-grip wafer handling achieves fast swap time
performance for the most demanding applications.
- Rectilinear-motion wafer engine provides simpler, more reliable,
easier setup and troubleshooting
- Flexible, configurable design and advanced software support reduced cycle
times and allow easy integration, serviceability and maintainability.
Spartan Sorter's industry-leading particle performance -- combined with low
cost-of-ownership driven by its high reliability, serviceability and maintainability
-- makes it what Asyst believes is the most powerful sorter available on the
market today.
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