The maintenance-free MicroTag permanently attaches to fab assets (such as Front-Opening-Unified-Pods (FOUPs), lots, pods, boxes, reticles, and probe cards) and travels with them between tools, in the Automated Material Handling System ( AMHS ) and in storage as part of Asyst's AdvanTag T system. The miniature MicroTag provides permanent maintenance free storage of 136 bytes of data such as lot ID, wafer ID, reticle ID, carrier history, and next process step.

Because AdvanTag relies on wireless radio frequency communications between the MicroTag and the AdvanTag antenna, it allows reading and writing of data in almost any application; line of site is not required.

Maximum Productivity & Profitability

MicroTag can be read and written at tool load ports (SMIF and open cassette), in the AMHS, in WIP racks, in tool buffers, anywhere positive identification of lots and fab assets is required.

Proof Point

The MicroTag has been proven reliable in more than 30 fabs worldwide for more than 10 years.