Asyst offers the industry's most advanced 200mm pod opener - the VPO. It provides advanced pod opening capabilities and is ergonomically designed to easily integrate SMIF contamination control technology for loading and unloading cassettes to and from 200mm SMIF-Pods™. The VPO is ideal for use in wafer starts, wafer outs, soft SMIF fabs, and pod/cassette cleaning stations. It easily integrates with SMART-Traveler™ System.

VersaPort exhibits better than ISO Class 2 performance when placed in an ISO Class 2 or better environment, or when properly integrated with a minienvironment suitable for ISO Class 2 performance.

Maximum Productivity & Profitability

• Fully interoperable with 200mm SMIF-Pods
  
  
• Automated lot tracking
  
  
• High-speed precise motion control
  
  
• Reliable actuation system
  
  
• Simple integration
  
  
• Ergonomic load/unload height
  
  
• SMIF contamination control technology for better than Class 1 environment
  
  
• Advanced diagnostic software with integrated self-test
  
  
• CE and SEMI compliance

Proof Point

80,000+ cycles MTBF @ 90% confidence level has been demonstrated in reliability lab testing.