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SMIF-VersaPort™ Manual Open Cassette Adapter (MOCA)

SMIF-VersaPort™ MOCA

Asyst's VersaPort MOCA adapter provides a solution for 200mm non-SMIF, open-cassette fabs. It easily attaches to the SMIF-VersaPort 2200, retaining all of its functionality and features.

  • Wafer mapping/cross-slotted sensing

  • Wafer protrusion sensing and re-seating

  • Excessive wafer protrusion sensing

  • Ergonomic tilt

  • Configurability with complete software and hardware compatibility and only one integration for both SMIF and open cassette.

   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.