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SMIF-LPT
Asyst Technologies' SMIF-LPT (Load Port Transfer) is an ergonomically designed
SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a
wide variety of 200mm and 150mm wafer processing and metrology tools. The SMIF-LPT
is designed for adaptive and equipment manufacturer applications for vacuum load-lock
tools, which require an external lateral cassette transfer mechanism.
The SMIF-LPT provides SMIF capability for a wide variety of wafer fab tools
and leads the industry in reduced cycle time and reduced footprint.
Maximum Productivity & Profitability
- A robust kinematic interface provides quick, accurate, and reliable mounting
and removal (a hinge and latch option is available for equipment manufacturer
integration).
- Wafer sensing and reseating system prevents wafer breakage.
- Wafer transfer is accomplished in a better than Class 1 minienvironment
ensures maximum protection from particulate contamination.
- Fast load and unload cycle time leads industry.
- Integrated SMART-Traveler™ System
provides lot tracking and control.
- Installed base of over 10,000 LPT/LPI units.
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