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EG-300 Edge
Grip Prealigner
It's been called the only viable edge grip aligner solution on
the market, and it is. Developed in Asyst's Nagoya facility, features
include:
- High performance accuracy:
Repeatability: Theta +/- 0.075 degrees
XY +/- 0.1 mm, 3 theta
- High speed alignment, <3 seconds
- Optional buffer for improved flexibility and throughput
- 7-degree offset eliminates need to re-pick & replace wafer
- Initial DVT is complete
- EVT and reliability programs in progress
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