Used with Asyst's EG-300 Prealigner , Axys Direct's active edge-grip end-effectors minimize wafer stress with closed loop force-feedback, reduce backside wafer contact by decreasing scratches and reducing particles, and ensure proper wafer gripping with break-the-beam wafer sensing.

• Dual end-effectors and fast wafer exchanges for higher throughput.
  
  
• Direct drive on all motion axes eliminates belts and bands, reducing known failure modes.
  
  
• Fewer moving parts and less than 130 parts total maximize reliability and serviceability.
  
  
• 2 and 3 I/O support without the need for a linear track.
  
  
• Advanced path planning, teaching, and diagnostics capability.