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Narrow Reticle
Indexer
SMIF-INX™ products are designed to supply reticle indexing for fixed Z-axis
handlers, or reticle cassette positioning to a fixed plane for Z-axis handlers.
SMIF Reticle Indexers can accommodate 6 and 9-inch reticles.
The internal PTFE ULPA filtration system maintains a better than ISO Class
3 environment. The contamination control benefits of the SMIF and SMIF-E-Charger
systems are well documented and can provide substantial productivity and yield
increases resulting in cost savings for the end user.
Maximum Productivity & Profitability
- Operates with single or multi (6) reticle cassettes.
- SMIF-INX mounts directly into the process tool.
- DC Servo control with position feedback provides high-speed wafer indexing
with minimal impact on tool cycle time ensuring positioning accuracy of ±0.005
inches (0.127mm).
- Patented laser-based sensing system provides precision reticle and slot
location, reticle position mapping, and sensing of protruding reticles.
- Quick disconnect cabling and mounting for easy maintenance.
- Load ports meet SEMI E15 and E19 specifications; 150R NRI also meets SEMI
S2 and S8.
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