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Interface Solutions

Asyst's interface products leverage nearly two decades of proven performance to offer customers world-class products for 300mm, 200mm, and 150mm applications. These high-quality interface products offer world-class performance:
  • IsoPort™ 300mm Load Port
    Reduced defect densities that exceed Class 1 performance

  • Simple tool integration with standard ASCII/SECS communications

  • SEMI and CE compliance

  • Low cost of ownership

  • Improved tool utilization from high reliability

  • Interoperability excellence

Standard Mechanical Interface (SMIF)

The SMIF family of input/output (I/O) devices is designed to protect products from contamination while providing a standard mechanical interface to wafer fab production tools. Used in combination with SMIF-Pods, multiple levels of contamination control strategy can be accommodated.

Learn More About Specific Products


   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.