


Automation Compliance and Testing Services
IC manufacturers and equipment suppliers both MUST have confidence prior to equipment delivery that equipment software has been implemented in conformance with SEMI® standards, the fab-specific automation requirements and operational scenarios, as well as the IC makers’ factory information systems architecture.
FACTS Inc. provides professional services and strategic consulting in support of factory automation programs and is dedicated to the improvement of factory automation capabilities for the semiconductor industry. FACTS is licensed by SEMATECH® (ISMI) to provide standardized testing in accordance with applicable SEMI® standards and by specific IC manufacturers to supply independent third party automation conformance testing and analysis to ensure that their equipment suppliers comply with the IC manufacturer’s fab-specific automation requirements.
As a strategic partner of Asyst Technologies, the following FACTS services are offered through Asyst:
- Sematech standardized protocol test services provider (TSP) professional services
- IC manufacturer specific automation software conformance testing
- Source inspection test outsourcing
- Equipment manufacturer automation external software quality assurance programs
- Automation operations specifications (AOS)
- Automation capabilities and supplier management (ACM)
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