SMART-Tag combines automated lot ID and fab floor operator user interface functions, letting operators communicate in real time with the tool and host via the LCD and operator response buttons. SMART-Tag, working with the SMART-Fab Suite™ of fab automation software products, improves operator and equipment efficiency and eliminates misprocessing and misrouting.

Maximize Productivity & Profitability

• Improves operator and manufacturing efficiency by traveling with the lot and communicating lot process information to the operator, equipment, and factory automation system.
  
  
• Displays lot and process-specific information on a large LCD using a choice of English, Chinese, or Japanese characters or custom symbols/icons.
  
  
• Communicates with manufacturing equipment and factory automation systems using industry standard SECS I/II messages, ensuring simplified integration and robust performance.
  
  
• Stores wafer maps, run card and split/merge information, and application-specific data for immediate access by the operator, manufacturing equipment, and factory automation systems.

Proof Point

SMART-Tag completed more than 5 million demonstrated read/write cycles without a single communication failure or communication retries during lab testing. In addition, since 1991, SMART-Tag has also demonstrated reliability of greater than 99.9% in fab applications.

Calculated MTBF of 70,000 hours (excluding scheduled maintenance)

Smart-Tag™ Reader

The SMART-Tag reader can be integrated into 300mm, 200mm, and 150mm SMIF load ports; stocker I/Os; WIP racks; and anywhere communication with SMART-Tag™ is required. It automatically communicates the lot ID upon arrival at a tool.

• The reader is available with or without a case.
  
  
• Requires 12VDC power source

Maximize Productivity & Profitability

SMART-Tag is used by 3-300mm fabs and more than 50-200mm fabs.