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300mm Wafer Fab Applications

Productivity and reliability of wafer logistics has become even more critical in the highly automated world of 300mm manufacturing. In collaboration with leading IC and equipment manufacturers, Asyst continues to develop and deploy a comprehensive set of 300mm production-ready products, designed to help global customers ease the transition to 300mm, minimize the risks of setting up 300mm fabs, and quickly achieve profitability goals.

Asyst's Fab Solutions provide customers with complete end-to-end wafer management and delivery solutions. The combination of tracking system, AMHS transport and storage, and wafer sorters helps fabs ramp faster and achieve their productivity goals cost effectively. Because these products work well with the automation systems Asyst provides to major equipment manufacturers, integration is simplified, and interoperability is greatly enhanced.

Maximum Productivity & Profitability

  • Asyst's SMART-Traveler™ Auto ID system is the semiconductor industry's preferred automated carrier ID system. It provides a proven, flexible auto ID capability that is SEMI E99 compliant, and it is integrated with virtually all fab systems-including load ports, stockers, and tracks. This assures the highest levels of wafer protection and lot integrity throughout the fab.

  • Asyst's next-generation Automated Material Handling System (AMHS) meets the throughput and capacity demands of high volume 300mmm manufacturing. It provides fabs with the most comprehensive AMHS offering-one that gives customers the benefits of Asyst's next-generation, DLT and conveyor, and best-of-breed hoist/car-based technology.

  • Interacting with FOUPs and auto ID systems, Asyst's wafer sorters assure maximum control throughout manufacturing by reducing handling defects and improving yields.

  • Asyst's Connectivity Software Solutions provides software products and integration services to successfully meet the needs of 300mm fabs. Equipment manufacturers are able to implement SEMI standard compliant Connectivity Software Solutions using ConX300 and ConX300+, leading edge products that address SEMI 300mm and object based standards. Fab customers are able to take advantage of products designed to simplify the task of providing for integration of advanced manufacturing applications such as e-Diagnostics, SPC, APC and Run to Run Control. All products are backed by a technical staff experienced in deploying cost effective and risk averse solutions.

Asyst Equipment Solutions enable manufacturers to quickly deliver fully automated equipment that meet applicable standards and user specifications cost effectively.

  • IsoPort™, Asyst's 300mm load port, gives semiconductor tool equipment manufacturers a highly configurable, automated wafer-handling solution that easily integrates with their tools.

  • VersaPort™, a bridge tool for 200mm to 300mm wafers, complies with the latest SEMI and CE standards and industry guidelines, offering customers best of class performance at the lowest cost of ownership.

Learn More About Specific Products

To learn more about how Asyst can optimize 300mm production, see Fab Solutions, Equipment Solutions or Connectivity Software Solutions. To learn more about specifc products, refer to:


   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.