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200mm Wafer Fab Applications

Asyst, the global leader in 200mmm automation, pioneered standard mechanical interface (SMIF) and SMART-Traveler™ solutions, which revolutionized 200mm productivity and set the standard for all 300mm fabs. These solutions have been deployed successfully in more than 85% of fabs worldwide-in new fabs, to upgrade existing fabs, and to help fabs achieve world class potential. Asyst's SMIF, SMART-Traveler, and sorter products work together to form an unbroken chain of protection throughout production.

Maximum Productivity & Profitability

  • Asyst's SMIF products reduce particle contamination, breakage, and scratches. Asyst load ports transfer wafers from clean SMIF-Pods to each process or metrology tool in the fab, in each instance providing a clean, reliable interface that improves tool utilization.

  • Using the Asyst SMART-Traveler auto ID system, SMIF load ports assure the highest levels of wafer protection and lot integrity throughout the fab.

  • Asyst wafer sorters automate all handling logistics, eliminating scratches and contamination during these important steps and preventing operator errors.

  • Asyst's Connectivity Software Solutions provides software and consulting services to implement 200mm automation, adapting to the unique requirements of each facility while leveraging the experience of a proven team of consultants and integrators.

Proof Point

Asyst-SMIF and SMART-Traveler systems create an efficient manufacturing system for 200mm production. Implementation provides immediate line and die yield benefits that result in a fast financial payback. Typical ROI is 6-7 months.

Learn More About Specific Products

To learn more about how Asyst can optimize 200mm production, see Equipment Solutions, Fab Solutions and Connectivity Software Solutions. To learn more about specific products, refer to:


   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.