FREMONT, Calif.-June 15, 2005 - Asyst Technologies, Inc. (Nasdaq: ASYT) announced today that Akrion-Goldfinger Technology has placed an order for multiple Spartan EFEMs, Asyst's next-generation unified atmospheric equipment front-end module (EFEM), for Akrion-Goldfinger's Mach 2MP advanced single-wafer post-deposition cleaning tool.

Based on the same technology and design platform as Asyst's market-leading Spartan Sorter, the Spartan EFEM revolutionizes equipment front-end wafer handling through its high performance and the simplicity of its design. Designed from the outset as a unified atmospheric wafer handling solution, the Spartan EFEM offers the ability to start up quickly, requires minimal design time and is easier to integrate into 300mm automated fabs. Additionally, its proprietary Wafer EngineT provides precise, high-speed wafer swaps, its optimized mini-environment offers better than ISO Class 1 performance, and its SMART-PlusT software provides a single, consistent interface to the front-end.

"Asyst's ability to offer a clean, reliable and high throughput integrated tool front-end solution, as well as providing a high level of customer support, were key factors in our decision," said Joe Miceli, vice president of operations for Akrion-Goldfinger. "With Asyst's Spartan EFEM, we can offer our enduser customers a versatile wafer handling solution for their production requirements."

Wayne Nobles, vice president and general manager, Factory Interface Division, for Asyst, said, "The benefits of the Spartan EFEM, including its high performance and low cost-of-ownership, continue to win orders. In selecting the Spartan EFEM, Akrion-Goldfinger is providing us with another strong endorsement of this revolutionary technology."

About Asyst Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor and flat panel display (FPD) manufacturers to increase their manufacturing productivity and protect their investments in materials during the manufacturing process. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chip and FPD manufacturers, as well as original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is http://www.asyst.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995 Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: Asyst's ability to provide targeted customer benefits and product efficiencies and performance, to integrate its systems effectively with those of OEM customers, to deliver and support its products in a timely manner, and other factors more fully detailed in Asyst's annual report on Form 10-K for the year ended March 27, 2004, and quarterly reports on Form 10-Q and Form 10-Q/A filed with the Securities and Exchange Commission.

"Asyst" is a registered trademark of Asyst Technologies, Inc. "Spartan," "Wafer Engine" and "SMART-Plus" are trademarks of Asyst Technologies, Inc. All Rights Reserved.