Semiconductor manufacturers require consistent automation implementations throughout the enterprise in order to deliver operational reliability. This mandatory equivalence demands that all tools in the factory be provided with a common set of pre-defined computer instructions, as well as a constant set of material-handling characteristics. Prior to the delivery of a tool to the fab, a complete validation of tool automation functionality is necessary. The same process is also needed for tools that have recently undergone significant automation software revisions or upgrades.

"We fully support the semiconductor industry's efforts to define a common set of benchmarks with which to gauge the effectiveness of a specific automation implementation, and our agreement with FACTS is demonstrative of our commitment to meet this industry need," said Paula LuPriore, vice president and general manager, connectivity solutions, for Asyst. "This agreement with FACTS strengthens our position as the industry’s preferred source for all 300mm factory automation software and hardware solutions, including our next generation software products in support of equipment integration, station control, and SEMI’s new Interface A and EDA standards."

Thomas Hogel, President of FACTS said, "Asyst's proactive support for independent third party automation testing demonstrates its commitment to ensuring that their products and services meet or exceed industry guidelines and will give their customers a clear competitive advantage. This agreement will help to significantly reduce the industry price point for these services as well as allowing FACTS to continue to improve both the quality of our service and customer responsiveness."

About FACTS, Inc.

Based in Austin, Texas FACTS provides professional services and strategic consulting in support of factory automation programs and is dedicated to the improvement of factory automation capabilities for the semiconductor industry. FACTS global professional services offerings including Automation Capabilities Management (ACM), Equipment Automation Testing and Source Inspections, and Test Outsourcing Services that are uniquely tailored to the requirements of the IC Maker and Equipment Supplier. For more information, visit http://www.facts-solutions.com.

About Asyst

Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor and flat panel display (FPD) manufacturers to increase their manufacturing productivity and protect their investments in materials during the manufacturing process. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chip and FPD manufacturers, as well as original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is http://www.asyst.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: Asyst’s ability to provide targeted customer benefits and product efficiencies and performance, to integrate its systems effectively with those of OEM customers, to deliver and support its products in a timely manner, and other factors more fully detailed in Asyst’s annual report on Form 10-K for the year ended March 27, 2004, and quarterly reports on Form 10-Q and Form 10-Q/A filed with the Securities and Exchange Commission.

FACTS is the trademark and service mark of FACTS, Inc. ("FACTS") in the United States. SEMATECH is the registered service mark of SEMATECH, Inc.

"Asyst" is a registered trademark of Asyst Technologies, Inc. All Rights Reserved.