Latest Competitive Win Continues Asyst’s Market Share Gains in 300mm Atmospheric Tool Automation

FREMONT, Calif.—October 17, 2003—Asyst Technologies, Inc. (Nasdaq: ASYT), a leading provider of integrated automation solutions that enhance semiconductor and FPD manufacturing productivity, today announced that ULVAC Technologies, Inc. has selected Asyst’s Plus™ Portal XT integrated equipment front-end system, GWconX300™ connectivity software, and software integration services for ULVAC’s 2ND Generation 300mm ENVIRO™ Advanced Resist and Residue Removal tool. The ULVAC tool is used for both conventional as well as low-k process applications for 45nm technology and beyond.

"Asyst’s ability to offer a complete automation solution, as well as providing a high level of customer support and integration services, were the key factors in our decision," said Wayne Anderson, Chief Operating Officer at ULVAC. “This approach allows us to offer our customers a high-performance and highly reliable wafer handling solution with the added advantage of shorter lead times and greater ease-of-integration."

Steve Schwartz, chairman and CEO of Asyst, said, "We are delighted that ULVAC selected Asyst for their 300mm wafer handling and integration requirements. This is another strong endorsement of our products, integration capabilities, and manufacturing model, and we look forward to moving forward with ULVAC as their automation solutions partner."

The Plus Portal XT is a turnkey automated equipment front-end system that incorporates a unique design approach and the latest in robotics and front-load technology to deliver cost-effective and enhanced productivity, serviceability and ease-of-integration. GWconX300 is software for implementing communications links on semiconductor wafer fabrication equipment, using the new Semiconductor Equipment and Materials International (SEMI) standard protocols required for all 300mm and advanced 200mm factory-automation systems. It provides run-time software libraries designed for incorporation with the embedded control software of any type of 300mm equipment. GWconX300 also provides tools for rapid development and integration of connectivity software. Key features include automated handling of inter-compatibility between new SEMI standards; field-configurable adjustments to ensure compatibility of equipment with older legacy host computers; automatic process, syntax checks and replies to all messages mandated by the specified SEMI standard; and hooks for synchronization with the SEMI E84 standard, to ensure a smooth handshake between production equipment and the AMHS.

About ULVAC: Founded in Japan in 1952, ULVAC is an international corporation that designs, manufacturers and markets equipment and materials for industrial applications of vacuum technology. Today, ULVAC is a leading global supplier of production systems, instrumentation, pumps and vacuum components used in the semiconductor, flat panel display, disk/magnetic media, and industrial manufacturing markets. The corporation is comprised of some 36 individual companies engaged in all sectors of the vacuum industry. The ULVAC name is derived from the company's conceptual foundation --- "The ULtimate in VACuum Technology." Combining several business units that had been operating domestically since 1975, ULVAC Technologies, Inc. was established in 1992 as the U.S. subsidiary of ULVAC, Inc. Headquartered in Methuen, Massachusetts, ULVAC Technologies provides sales and service to the North American market for all ULVAC products. In addition, this facility is equipped with a class-100 cleanroom for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photoresist stripper.

About Asyst: Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor and flat panel display (FPD) manufacturers to enhance manufacturing productivity and protect investments in materials during the manufacturing process. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst’s modular, interoperable solutions allow chip and FPD manufacturers, as well as original equipment manufacturers, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst’s homepage is http://www.asyst.com

"Safe Harbor" Statement
Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: the risk that customers will delay, reduce or cancel planned projects and thus delay our recognition or the amount of our anticipated revenue, risks associated with the acceptance of new products and product capabilities, competition in the semiconductor and FPD equipment industries, and other factors more fully detailed in the Company’s annual report on Form 10-K for the year ended March 31, 2003 and other reports filed with the Securities and Exchange Commission.

CONTACT:
Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com