FREMONT, Calif.-April 8, 2003 - Asyst Technologies, Inc. (Nasdaq: ASYT) and Mattson Technology, Inc. (Nasdaq: MTSN) today jointly announced a development alliance to integrate Asyst's next-generation unified atmospheric equipment front-end with Mattson's advanced 300mm rapid thermal processing (RTP) equipment.

Traditional equipment front-ends have historically involved labor- and time-intensive integration of multiple components-atmospheric wafer-handling robotics, loadports, wafer ID and tracking readers, mini-environments, control software-to form a complex tool front-end. Chipmakers today are seeking less complex, more reliable, more serviceable solutions. Asyst's new offering, the industry's first truly unified automated tool front-end system, is designed to address these needs, and deliver industry-leading configurability, throughput, accuracy and particle performance. Mattson will integrate the new front-end in its advanced RTP systems. The successful integrated solution will offer a number of benefits to chip manufacturers, including optimized cleanroom space, lower cost of ownership, and increased wafer throughput.

Stephen Schwartz, chief executive officer of Asyst Technologies, said, "The relationship between Mattson and Asyst goes back many years and spans several generations of tool-loading and atmospheric wafer-handling technology. We are extremely pleased that Mattson has agreed to work with us in integrating this entirely new technology with their advanced process equipment. This alliance reflects both companies' commitment to providing high performance and high reliability while improving overall cost of ownership to the end customer."

"We are committed to executing our technology roadmap and optimizing manufacturing performance, while reducing lead times and cost of ownership for our customers," said Robert MacKnight, chief operating officer of Mattson Technology. "This joint development program with Asyst is one element of our strategy to achieve these objectives. The development alliance leverages both companies' strengths-Mattson's expertise in advanced RTP processes, and Asyst's in-depth knowledge of SMIF and automation technologies-to help us increase the value of our product offerings to our global customer base."

About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company's core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 2800 Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 226-8241. Internet: www.mattson.com.

About Asyst Technologies
Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor manufacturers to increase manufacturing productivity and protect investments in silicon wafers during the manufacture of integrated circuits, or ICs. The company offers a broad range of 200mm and 300mm solutions that enable the safe transfer of wafers and information between process equipment and the fab line throughout the IC fabrication process, while reducing IC damage caused by human, environmental, mechanical and chemical factors. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is http://www.asyst.com

Safe Harbor Statement
This press release includes statements that are forward-looking, such as statements regarding future product development plans and anticipated product opportunities. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks and uncertainties associated with the development of new technology and the acceptance of new products and product capabilities and other factors more fully detailed in the Companies' most recent 10-K and 10-Q reports on file with the Securities and Exchange Commission.

CONTACT:

Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com