FREMONT, Calif. - June 22, 2001 - Asyst Technologies, Inc. (Nasdaq NM: ASYT), the leading provider of Standard Mechanical Interface (SMIF)-based manufacturing automation systems, today announced that the installation of the first phase of its FasTrack™ automated fab transport system has been operational for over a month. Atmel Corporation (Nasdaq NM: ATML) ordered the Asyst FasTrack system in September 2000, with plans to install the equipment in its Fab 8 microcontroller and memory facility in Irving, Texas, which became operational earlier this year. Asyst noted that Atmel has accepted the system.

Atmel's completion of the first phase of a planned four-phase FasTrack installation at Fab 8 represents the first U.S. implementation of continuous-flow transport (CFT) technology for a fab automated material handling system (AMHS). Upon completion, nearly 2,300 feet (0.4 miles or 0.7 kilometers) of FasTrack and more than 85 FasTurn™ directional controllers, as well as multiple overhead load stations and vertical transfer switches, will move up to 650 production lots per hour of 200mm wafers between two buildings at the Fab 8 site.

Dr. T.C. Wu, Atmel's senior vice president and chief technology officer, said, "The Asyst FasTrack system has exhibited superior performance and reliability in the short time that we have been using it at Fab 8. We originally selected the Asyst solution because we felt it offered a degree of flexibility and combination of features unmatched by anything else on the market. We look forward to completing the future phases of the installation, which will allow us to take full advantage of the many benefits FasTrack has to offer."

According to Dennis Riccio, Asyst's senior vice president of global customer operations, the Atmel installation is a key milestone not only for the customer relationship, but for Asyst's AMHS strategy, as well. "The completion of Phase 1 of our first full-fab FasTrack implementation is significant and demonstrates the advantages this technology offers, compared to traditional vehicle-based systems," said Riccio. "Not only does FasTrack enable us to provide a complete fab-wide solution to Atmel and other customers, it also positions Asyst as a formidable new technology contender for the $300-million-per-year interbay/intrabay market."

The FasTrack system is designed to help decrease AMHS capital costs by approximately 25 percent and improve the speed and predictability of transport delivery by as much as 50 percent. As a result, FasTrack is beneficial for fabs in which automation is essential for every lot at every step of production.

Built from the ground up to conform to Semiconductor Equipment and Materials International (SEMI) interoperability standards, FasTrack is a key component of Asyst's "Value-Assured Fab" strategy, which combines isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software. Thus, the Value-Assured Fab strategy is leveraged throughout the entire integrated circuit (IC) fabrication process. FasTrack's unique, open architecture addresses multiple transport challenges while seamlessly integrating interbay and intrabay transport systems to improve fab equipment utilization. The system can move hundreds of carriers independently and simultaneously, providing customers with high capacity and short, predictable delivery times. Its modular design gives customers the ability to easily expand the system, add vicinity loading stations and interface to intrabay systems.

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: the volatility of semiconductor industry cycles, failure to respond to rapid demand shifts, dependence on a few significant customers, the transition of the industry from 200mm wafers to 300mm wafers, risks associated with the acceptance of new products and product capabilities, including our Plus Portal systems, competition in the semiconductor equipment industry, failure to efficiently integrate acquired companies, failure to retain employees, and other factors more fully detailed in the Company's annual report on Form 10-K for the year ended March 31, 2001 filed with the Securities and Exchange Commission on June 19, 2001.

About Atmel
Founded in 1984, Atmel Corporation is headquartered in San Jose, Calif., with manufacturing facilities in North America and Europe. Atmel designs, manufactures and markets worldwide, advanced logic, mixed-signal, nonvolatile memory and RF semiconductors. Atmel is also a leading provider of system-level integration semiconductor solutions using CMOS, BiCMOS, bipolar SiGe and high-voltage BCDMOS process technologies. (Note to Editors: Atmel product and financial information can be retrieved from its Fax-on-Demand service. In North America call 800/292-8635. Internationally from a fax phone, dial 408/441-0732. Requests may be sent via e-mail to literature@atmel.com or by visiting Atmel's website.

About Asyst
Asyst Technologies, Inc. is a leading provider of integrated automation systems for the semiconductor manufacturing industry, which enable semiconductor manufacturers to increase their manufacturing productivity and protect their investment in silicon wafers during the manufacture of integrated circuits, or ICs. Through its "Value-Assured Fab" strategy, Asyst offers a broad range of 200mm and 300mm solutions that enable the safe transfer of wafers and information between the process equipment and the fab line throughout the IC fabrication process, while reducing IC damage caused by human, environmental, mechanical and chemical factors. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs.