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Press Release

Asyst
Open-Cassette Adapter Broadens Horizons for OEM Suppliers

New MOCA Front-End Option Helps Bridge Gap Between Open Wafer
Cassettes and Newer Isolation Technology, Allowing Older Fabs
to Implement SMIF-Optimized Process Tools
Fremont, CA, February 27, 2001 -Asyst
Technologies, Inc. (Nasdaq NM: ASYT), the world's largest semiconductor
fab automation company, today unveiled a new addition to its family
of front-end wafer-cassette input/output (I/O) products. The Asyst
manual open-cassette adapter (MOCA) is a bolt-on option for Asyst's
200mm class load port tools that, when paired with original equipment
manufacturers' (OEMs') process tools, allows fabs to run older-technology
open wafer cassettes on new 200mm tools. This creates a bridge to
Class 1-quality isolation based on Standard Mechanical InterFace
(SMIF) technology-for which most current 200mm tools are optimized-thus
enabling older fabs to take advantage of modern SMIF designs without
having to immediately implement a full-fab upgrade.
While the overwhelming majority of
new semiconductor fabs use SMIF technology, many of the world's
older semiconductor fabrication facilities still use open-cassette
technology. However, fully SMIF-implemented fabs produce significantly
higher yields than open-cassette fabs. While Asyst continues
to strongly encourage manufacturers using the less-clean open-cassette
technology to transition to SMIF, the MOCA option gives Asyst
a unique opportunity to meet the needs of this market segment.
With the new adapter added to Asyst front-end tools and ported
to their SMIF-ready 200mm process systems, OEMs can offer a more
comprehensive set of solutions to their end-user customers.
"We know that many companies operating
open-cassette fabs would like to use newer-generation manufacturing
tools, but aren't yet ready to implement a full upgrade to SMIF," said
Tony Bonora, Asyst's chief technology officer. "Now, with the
MOCA option, we can offer fabs a newer-class tool that's SMIF-ready,
but can also run open cassettes today. Then, when the company
is prepared to transition to the SMIF process, they can simply
remove the adapter instead of replacing the entire I/O front
end. In this way, our I/O tools, due to their full plug-and-play
compatibility, can become a true bridge, both backward to the
open-cassette marketplace and forward into the realm of 300mm
wafers. This is the kind of flexibility that chipmakers need,
and now Asyst, working together with our OEM customers, can provide
it."
Production versions of MOCA have
already begun shipping with the VersaPort 2200 load port
tool to key OEM customers; to date, Asyst has shipped over 230
units. The adapter is fully certified to the Semiconductor Equipment
and Materials International (SEMI) S2 standard and the European
CE standard for safety and reliability, assuring ease of certification
for any OEM that purchases the product for use with its tools.
Pricing and Availability
The Asyst MOCA load-port option is base-priced at less than $4,900,
and is available now for use with the VersaPort 2200 load
port tool. By early
2001, the MOCA adapter will be available as a bolt-on production option
to Asyst's other front-end products in the SMIF 200mm Load-Port I/O Series,
including the SMIF-LPT (Load-Port Transfer) and SMIF-LPI (Load-Port Interface),
and the SMIF-INX (Indexer) Series. The product will also be available
midyear as a standalone configuration for implementation in the field with
existing systems.
About Asyst
Asyst Technologies, Inc. is the leading provider of isolation
and automation technologies that enable semiconductor makers
to protect their valued assets
throughout the manufacturing process while increasing manufacturing productivity.
Through this "Value-Assured Fab" strategy, Asyst offers a broad range of
200mm and 300mm solutions that enable the safe transfer of wafers and information
between the process equipment and the fab line throughout the IC fabrication
process, preventing human, environmental, mechanical and chemical harm.
Encompassing robotics, portals, wafer and reticle carriers, connectivity
and interface products, and transport and loading products, Asyst's modular,
interoperable solutions allow chipmakers and original equipment manufacturers
(OEMs) to select and employ the value-assured, hands-off manufacturing
capabilities that best suit their needs.
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