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Asyst's new Agile Automation solution is shown here in an integrated wafer sorter application. Wafers are buffered locally in Satellite Stockers and shuttled to the tool through a floor-based conveyor.
Direct Load lifting loadports are enabled to lift FOUPs directly from the conveyor, eliminating the need for an OHT vehicle to load or unload the tool. |
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The new Falcon Integrated Loadport is a next generation loadport designed for high reliability and easier tool integration and factory setup. It offers leading edge particle performance as well as industry leading open/close FIMS door throughput. Production of the Falcon has begun at Asyst's Singapore manufacturing facility.
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Asyst Technologies, Inc., founded in 1984, provides automation solutions
optimized for the needs of our global customers in the semiconductor,
flat panel display, and related industries. As the most experienced
fab automation company, we are dedicated to helping our customers
gain competitive advantage through the intelligent application of
our wide range of productivity- and yield-boosting technologies.
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